EFFECT OF SUBSTRATE-TEMPERATURE ON PROPERTIES OF GLOW-DISCHARGED HYDROGENATED AMORPHOUS-SILICON

被引：35
作者：
SHIRAFUJI, J
KUWAGAKI, M
SATO, T
INUISHI, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 10期
关键词：
D O I：
10.1143/JJAP.23.1278
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1278 / 1286
页数：9
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