A NEW INTERFEROMETRIC ALIGNMENT TECHNIQUE WITH HOLOGRAPHIC CONFIGURATION

被引：2
|
作者：
NOMURA, N
MATSUMURA, T
YONEZAWA, T
KUGIMIYA, K
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 11期
关键词：
D O I：
10.1143/JJAP.24.1555
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1555 / 1560
页数：6
相关论文
共 50 条
  • [1] NEW INTERFEROMETRIC ALIGNMENT TECHNIQUE WITH HOLOGRAPHIC CONFIGURATION.
    Nomura, Noboru
    Matsumura, Takayoshi
    Yonezawa, Taketoshi
    Kugimiya, Koichi
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 1985, 24 (11): : 1555 - 1560
  • [2] NEW INTERFEROMETRIC ALIGNMENT TECHNIQUE
    FLANDERS, DC
    SMITH, HI
    AUSTIN, S
    APPLIED PHYSICS LETTERS, 1977, 31 (07) : 426 - 428
  • [3] SIMPLE INTERFEROMETRIC-TECHNIQUE FOR ALIGNMENT OF SEGMENTED RETROREFLECTORS
    BARGER, RL
    APPLIED OPTICS, 1980, 19 (13): : 2088 - 2090
  • [4] NEW PROCEDURE FOR HOLOGRAPHIC INTERFEROMETRIC STUDIES OF LIQUID DIFFUSION
    GABELMANNGRAY, L
    FENICHEL, H
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (07): : 971 - 971
  • [5] NEW TECHNIQUE FOR HOLOGRAPHIC MULTIPLEXING
    SOM, SC
    LESSARD, RA
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (11) : 1554 - &
  • [6] NEW TECHNIQUE FOR HOLOGRAPHIC MULTIPLEXING
    SOM, SC
    LESSARD, RA
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) : 1240 - &
  • [7] ALIGNMENT OF X-RAY LITHOGRAPHY MASKS USING A NEW INTERFEROMETRIC-TECHNIQUE - EXPERIMENTAL RESULTS
    AUSTIN, S
    SMITH, HI
    FLANDERS, DC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03): : 984 - 986
  • [8] NEW TECHNIQUE OF HOLOGRAPHIC MULTIPLEXING
    SINGH, M
    INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1978, 16 (08) : 780 - 781
  • [9] New technique for holographic multiplexing
    SOM SC
    LESSARD RA
    1971, 61 (09): : 1240 - 1245
  • [10] A new calibration technique for interferometric radiometers
    Corbella, I
    Torres, F
    Camps, A
    Bará, J
    SENSORS, SYSTEMS, AND NEXT-GENERATION SATELLITES II, 1998, 3498 : 359 - 366
12345