QUANTITATIVE-DETERMINATION OF OXYGEN IN ALGAAS LAYERS BY SECONDARY ION MASS-SPECTROMETRY UNDER O-18 FLUX

被引：7
|
作者：
ACHTNICH, T [1 ]
BURRI, G [1 ]
ILEGEMS, M [1 ]
机构：
[1] UNIV LAUSANNE,INST EXPTL PHYS,CH-1015 LAUSANNE,SWITZERLAND
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期
关键词：
D O I：
10.1116/1.575792
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2532 / 2536
页数：5
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