SEPARATION OF LINEAR AND PARABOLIC TERMS IN STEAM OXIDATION OF SILICON

被引：75
作者：
PLISKIN, WA
机构：
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1966年 / 10卷 / 03期
关键词：
D O I：
10.1147/rd.103.0198
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
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页码：198 / &
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