MEASUREMENTS ON LOCAL VARIATIONS IN SPACING AND ORIENTATION OF LATTICE PLANE OF SILICON SINGLE CRYSTALS BY X-RAY DOUBLE-CRYSTAL TOPOGRAPHY

被引：75
作者：
KIKUTA, S
KOHRA, K
SUGITA, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1966年 / 5卷 / 11期
关键词：
D O I：
10.1143/JJAP.5.1047
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1047 / &
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