ANALYSIS OF IONIC FRAGMENTS FROM 308 NM PHOTOABLATION OF POLYIMIDE

被引：25

作者：

CAMPBELL, EEB

ULMER, G

BUES, K

HERTEL, IV

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 06期

关键词：

D O I：

10.1007/BF00617855

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：543 / 547

页数：5

共 12 条

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