PROMOTED OXIDATION OF THE K-MODIFIED SI(100) (2X1) SURFACE - ELECTRON-ENERGY-LOSS-SPECTROSCOPY AND THERMAL-DESORPTION STUDIES

被引:14
作者
TAKAGI, N
MINAMI, N
TANAKA, S
NISHIJIMA, M
机构
[1] Department of Chemistry, Faculty of Science, Kyoto University
来源
PHYSICAL REVIEW B | 1991年 / 44卷 / 23期
关键词
D O I
10.1103/PhysRevB.44.12945
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The interaction of the K-covered Si(100) (2 X 1) surface with oxygen has been investigated by the use of high-resolution electron-energy-loss spectroscopy and thermal-desorption spectroscopy. It was found that the mechanism of enhanced oxidation of the K-modified Si(100) (2 X 1) surface is dependent on the fractional K coverage THETA(K). At low coverage THETA(K) less-than-or-equal-to 1). K atoms reduce the work function of the Si surface, thus increasing the initial sticking probability of oxygen; the oxygen atoms are bonded to Si and potassium oxides are not formed. However, at high coverage (THETA(K) > 1), K adatoms are bonded to oxygen and potassium oxides (K2O2, KO2) are formed; the promoting mechanism is related to the thermal decomposition of these oxides which play the role of an "oxygen reservoir."
引用
收藏
页码:12945 / 12951
页数:7
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