PROCESSING CONDITIONS FOR BORON-NITRIDE COATINGS IN FIBER-BUNDLES VIA CHEMICAL-VAPOR-DEPOSITION

被引：15

作者：

EINSET, EO

PATIBANDLA, NB

LUTHRA, KL

机构：

[1] General Electric Corporate Research and Development, Schenectady, New York

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1994年 / 77卷 / 12期

关键词：

D O I：

10.1111/j.1151-2916.1994.tb04552.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A model for the transport and reaction of BCl3 and NH3 for the deposition of BN on individual filaments in a fiber bundle at low pressures has been developed using previously published kinetic data. An operating diagram is presented which summarizes the results of the model and facilitates the choice of deposition parameters for obtaining uniform coatings throughout the bundle. The uniformity of coatings deposited on individual fibers of Nicalon, Sumitomo-Al2O3 fiber bundles, and straight weave Nicalon cloth is consistent with the model predictions.

引用

页码：3081 / 3086

页数：6

共 38 条

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