MASS-SPECTROMETRIC STUDY OF GA(CH3)3 AND GA(C2H5)3 DECOMPOSITION REACTION IN H-2 AND N-2

被引:203
作者
YOSHIDA, M [1 ]
WATANABE, H [1 ]
UESUGI, F [1 ]
机构
[1] NEC CORP,OPTO ELECTR RES LABS,MIYAMAE,KAWASAKI 213,JAPAN
关键词
D O I
10.1149/1.2113929
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:677 / 679
页数:3
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