MICROWRITING OF GOLD PATTERNS WITH THE SCANNING ELECTROCHEMICAL MICROSCOPE

被引:66
作者
MELTZER, S
MANDLER, D
机构
[1] Department of Inorganic and Analytical Chemistry, The Hebrew University of Jerusalem
关键词
D O I
10.1149/1.2044252
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The deposition of gold patterns an indium-tin-oxide (ITO) with the scanning electrochemical microscope (SECM) has been accomplished by the controlled dissolution of a gold microelectrode. The continuous anodic dissolution of gold at the microelectrode in the presence of bromide while maintaining the potential of the ITO constant resulted in the deposition of microcrystalline structures of gold. The unique advantages of the SECM made it possible to suggest a mechanism for the precess based on the structures as well as the parameters that control the deposition process.
引用
收藏
页码:L82 / L84
页数:3
相关论文
共 34 条
[21]   SCANNING ELECTROCHEMICAL MICROSCOPY - THE APPLICATION OF THE FEEDBACK MODE FOR HIGH-RESOLUTION COPPER ETCHING [J].
MANDLER, D ;
BARD, AJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (10) :3143-3144
[22]   DIRECT DEPOSITION OF 10-NM METALLIC FEATURES WITH THE SCANNING TUNNELING MICROSCOPE [J].
MCCORD, MA ;
KERN, DP ;
CHANG, THP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06) :1877-1880
[23]   STUDY OF SILICON ETCHING IN HBR SOLUTIONS USING A SCANNING ELECTROCHEMICAL MICROSCOPE [J].
MELTZER, S ;
MANDLER, D .
JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS, 1995, 91 (06) :1019-1024
[24]  
NAGAHARA LA, 1992, ELECTROCHEMICAL MICR, P254
[25]  
NSHIZAWA M, 1991, J PHYS CHEM-US, V95, P9042
[26]   LAYER-BY-LAYER NANOMETER SCALE ETCHING OF 2-DIMENSIONAL SUBSTRATES USING THE SCANNING TUNNELING MICROSCOPE [J].
PARKINSON, B .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1990, 112 (21) :7498-7502
[27]  
PARSONS R, 1959, HDB ELECTROCHEMICAL, P79
[28]  
QUATE CF, 1990, NATO ASI SERIES E
[29]  
QURESHI MM, 1978, PARK J SCI RES, V30, P22
[30]   NANOMETER-SCALE REVERSIBLE RECORDING USING STM [J].
SATO, A ;
TSUKAMOTO, Y .
ADVANCED MATERIALS, 1994, 6 (01) :79-80