THERMODYNAMIC ANALYSIS AND DEPOSITION OF REFRACTORY MATERIALS

This article does not pretend to be an exhaustive review of all publications in which a thermodynamic analysis has been used to analyse the chemical vapour deposition of refractory materials. It simply covers a certain number of experiments in which the present authors made use of various aspects of this method: overall or partial optimization of a process, determination of the deposition material most suited to fulfilling a given role and approach to mechanisms governing the chemical deposition reaction. A thermodynamic analysis is presented here from a more unusual angle, by examples of localized and varied intervention, in order to demonstrate the multiple uses of the method.