EVALUATION OF DEEP LEVELS IN SEMICONDUCTORS USING FIELD-EFFECT TRANSCONDUCTANCE

被引:11
|
作者
WADA, O [1 ]
YANAGISAWA, S [1 ]
TAKANASHI, H [1 ]
机构
[1] FUJITSU LABS LTD,KAMIKODANAKA 1015,NAKAHARA,KAWASAKI,JAPAN
关键词
D O I
10.1143/JJAP.14.157
中图分类号
O59 [应用物理学];
学科分类号
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页码:157 / 158
页数:2
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