PROPERTIES OF AMORPHOUS SILICON NITRIDE FILMS

被引：132
|
作者：
HU, SM
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1966年 / 113卷 / 07期
关键词：
D O I：
10.1149/1.2424093
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：693 / +
页数：1
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