GEOMETRY OF THIN-FILM MORPHOLOGY

被引:205
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MESSIER, R
YEHODA, JE
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10.1063/1.335639
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O59 [应用物理学];
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页码:3739 / 3746
页数:8
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[1]   COMPARATIVE-STUDY OF STRUCTURE OF EVAPORATED AND GLOW-DISCHARGE SILICON [J].
BARNA, A ;
BARNA, PB ;
RADNOCZI, G ;
TOTH, L ;
THOMAS, P .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1977, 41 (01) :81-84
[2]   COMPUTER-SIMULATION OF POST-NUCLEATION GROWTH OF THIN AMORPHOUS-GERMANIUM FILMS [J].
BARNA, A ;
BARNA, PB ;
RADNOCZI, G ;
SUGAWARA, H ;
THOMAS, P .
THIN SOLID FILMS, 1978, 48 (02) :163-174
[3]  
COFFIN LF, 1964, J AM CERAM SOC, V47, P473
[4]   MICROWAVE CONDUCTIVITY OF GRANULAR SUPERCONDUCTING ALUMINUM FILMS [J].
DAIELLO, RV ;
FREEDMAN, SJ .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (05) :2156-&
[5]   COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J].
DIRKS, AG ;
LEAMY, HJ .
THIN SOLID FILMS, 1977, 47 (03) :219-233
[6]   HIGH-RESOLUTION ELECTRON MICROSCOPE OBSERVATION OF VOIDS IN AMORPHOUS GE [J].
DONOVAN, TM ;
HEINEMAN.K .
PHYSICAL REVIEW LETTERS, 1971, 27 (26) :1794-&
[7]  
GIRI AP, 1984, J VAC SCI TECHNOL A, V2, P221
[8]   RF-SPUTTERED SILICON AND HAFNIUM NITRIDES - PROPERTIES AND ADHESION TO 440C STAINLESS-STEEL [J].
GRILL, A ;
ARON, PR .
THIN SOLID FILMS, 1983, 108 (02) :173-180
[9]   SPUTTERING MODELS - A SYNOPTIC VIEW [J].
HARRISON, DE .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 70 (1-4) :1-64
[10]   AC CONDUCTIVITY AND OPTICAL-PROPERTIES OF AMORPHOUS SI(H) SPUTTERED AT 77-K [J].
HAUSER, JJ ;
PASTEUR, GA ;
STAUDINGER, A .
PHYSICAL REVIEW B, 1981, 24 (10) :5844-5851