ADSORPTION STATES AND ADSORPTION-KINETICS OF ATOMIC-HYDROGEN ON SILICON CRYSTAL-SURFACES

被引:168
作者
FROITZHEIM, H
KOHLER, U
LAMMERING, H
机构
关键词
D O I
10.1016/0039-6028(85)90080-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:537 / 557
页数:21
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