TRIPYRAMIDS AND ASSOCIATED DEFECTS IN EPITAXIAL SILICON LAYERS

被引：21
作者：
BOOKER, GR
机构：
来源：
PHILOSOPHICAL MAGAZINE | 1965年 / 11卷 / 113期
关键词：
D O I：
10.1080/14786436508223961
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：1007 / &
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