OBSERVATIONS OF ELECTRON-BEAM-INDUCED THERMAL EFFECTS IN AMORPHOUS SE80AS20 AND SE64AS16AU20 THIN-FILMS

被引：8
作者：
MEE, PB [1 ]
机构：
[1] SPERRY UNIVAC,ISS,CUPERTINO,CA 95014
来源：
THIN SOLID FILMS | 1975年 / 26卷 / 02期
关键词：
D O I：
10.1016/0040-6090(75)90139-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：227 / 241
页数：15
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