OBSERVATIONS OF ELECTRON-BEAM-INDUCED THERMAL EFFECTS IN AMORPHOUS SE80AS20 AND SE64AS16AU20 THIN-FILMS

被引:8
|
作者
MEE, PB [1 ]
机构
[1] SPERRY UNIVAC,ISS,CUPERTINO,CA 95014
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D O I
10.1016/0040-6090(75)90139-X
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:227 / 241
页数:15
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