IN-SITU MASS-SPECTROMETRIC STUDY OF THE GAS-PHASE SPECIES INVOLVED IN CVD OF DIAMOND AS A FUNCTION OF FILAMENT TEMPERATURE

被引：37
作者：
REGO, CA [1 ]
MAY, PW [1 ]
HENDERSON, CR [1 ]
ASHFOLD, MNR [1 ]
ROSSER, KN [1 ]
EVERITT, NM [1 ]
机构：
[1] UNIV BRISTOL,DEPT AEROSP ENGN,BRISTOL BS8 1TR,AVON,ENGLAND
来源：
DIAMOND AND RELATED MATERIALS | 1995年 / 4卷 / 5-6期
关键词：
HEATED FILAMENT CVD; GAS PHASE CHEMISTRY; IN-SITU DIAGNOSTICS; MASS SPECTROMETRY;
D O I：
10.1016/0925-9635(94)05302-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have used a molecular beam mass spectrometer to obtain quantitative measurements of the composition of the gas-phase species during the chemical vapour deposition (CVD) of diamond films as a function of filament temperature for a variety of different hydrocarbon precursor gases. For filament temperatures near to, and above, the optimum for diamond growth (ca. 2400 K), we End that the relative concentrations of the various stable hydrocarbon species (CH4, C2H2 and C2H4) present in the gas mixture, and the way that these concentrations vary with temperature, are remarkably insensitive to the particular choice of hydrocarbon feedstock gas.
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页码：770 / 774
页数：5
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