ULTRA-HIGH-VACUUM REFLECTION ELECTRON-MICROSCOPY STUDY OF STEP-DISLOCATION INTERACTION ON SI(111) SURFACE

被引:6
作者
LATYSHEV, A [1 ]
MINODA, H [1 ]
TANISHIRO, Y [1 ]
YAGI, K [1 ]
机构
[1] RUSSIAN ACAD SCI,INST SEMICOND PHYS,SIBERIAN BRANCH,NOVOSIBIRSK 630090,RUSSIA
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 10期
关键词
STEP; SI(111); STIFFNESS; STEP DISLOCATION INTERACTION; SUBLIMATION; REFLECTION ELECTRON MICROSCOPY; REM;
D O I
10.1143/JJAP.34.5768
中图分类号
O59 [应用物理学];
学科分类号
摘要
Interaction between monatomic steps and dislocation emerging at the surface has been studied by in situ ultra high vacuum reflection electron microscopy (UHV REM). It was shown that during sublimation the motion of the step was suppressed in the dislocation strain field around dislocation core regions. The energy of the step-dislocation interaction was estimated from a mechanical analogy a with pinning phenomenon of an infinitely long string moving in uniform medium. The relaxation time was measured from relaxation processes of the step shape after passing across the dislocation core at the high temperature of sublimation. Dynamical step stiffness was evaluated from measurements of the relaxation time. The data obtained are discussed in the framework of recently developed theories.
引用
收藏
页码:5768 / 5773
页数:6
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