EFFECT OF HYDROGEN DILUTION OF SILANE ON OPTOELECTRONIC PROPERTIES IN GLOW-DISCHARGED HYDROGENATED SILICON FILMS

被引：8
作者：
SHIRAFUJI, J
NAGATA, S
KUWAGAKI, M
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 09期
关键词：
D O I：
10.1063/1.335752
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3661 / 3663
页数：3
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