MICROPATTERNING OF HIGH-TC FILMS WITH AN EXCIMER LASER

被引：46

作者：

MANNHART, J

SCHEUERMANN, M

TSUEI, CC

OPRYSKO, MM

CHI, CC

UMBACH, CP

KOCH, RH

MILLER, C

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 15期

关键词：

D O I：

10.1063/1.99678

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1271 / 1273

页数：3

共 9 条

[1]

BUHRMAN RA, COMMUNICATION

[2] EFFECTS OF RADIATION-DAMAGE IN ION-IMPLANTED THIN-FILMS OF METAL-OXIDE SUPERCONDUCTORS [J].

CLARK, GJ ;

MARWICK, AD ;

KOCH, RH ;

LAIBOWITZ, RB .

APPLIED PHYSICS LETTERS, 1987, 51 (02) :139-141

[3] THERMODYNAMIC FLUCTUATIONS IN THE SUPERCONDUCTOR Y1BA2CU3O9-DELTA - EVIDENCE FOR 3-DIMENSIONAL SUPERCONDUCTIVITY [J].

FREITAS, PP ;

TSUEI, CC ;

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PHYSICAL REVIEW B, 1987, 36 (01) :833-835

[4] PULSED LASER ETCHING OF HIGH-TC SUPERCONDUCTING FILMS [J].

INAM, A ;

WU, XD ;

VENKATESAN, T ;

OGALE, SB ;

CHANG, CC ;

DIJKKAMP, D .

APPLIED PHYSICS LETTERS, 1987, 51 (14) :1112-1114

[5] QUANTUM INTERFERENCE DEVICES MADE FROM SUPERCONDUCTING OXIDE THIN-FILMS [J].

KOCH, RH ;

UMBACH, CP ;

CLARK, GJ ;

CHAUDHARI, P ;

LAIBOWITZ, RB .

APPLIED PHYSICS LETTERS, 1987, 51 (03) :200-202

[6] REPRODUCIBLE TECHNIQUE FOR FABRICATION OF THIN-FILMS OF HIGH TRANSITION-TEMPERATURE SUPERCONDUCTORS [J].

MANKIEWICH, PM ;

SCOFIELD, JH ;

SKOCPOL, WJ ;

HOWARD, RE ;

DAYEM, AH ;

GOOD, E .

APPLIED PHYSICS LETTERS, 1987, 51 (21) :1753-1755

[7] MAGNETRON SPUTTERING AND LASER PATTERNING OF HIGH TRANSITION-TEMPERATURE CU OXIDE-FILMS [J].

SCHEUERMANN, M ;

CHI, CC ;

TSUEI, CC ;

YEE, DS ;

CUOMO, JJ ;

LAIBOWITZ, RB ;

KOCH, RH ;

BRAREN, B ;

SRINIVASAN, R ;

PLECHATY, MM .

APPLIED PHYSICS LETTERS, 1987, 51 (23) :1951-1953

[8]

SCHEUERMANN M, UNPUB

[9] MEASUREMENT OF ANISOTROPIC RESISTIVITY AND HALL CONSTANT FOR SINGLE-CRYSTAL YBA2CU3O7-X [J].

TOZER, SW ;

KLEINSASSER, AW ;

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KAISER, D ;

HOLTZBERG, F .

PHYSICAL REVIEW LETTERS, 1987, 59 (15) :1768-1771

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