OPTICAL-SYSTEM FOR MEASURING THE PROFILES OF SUPER-SMOOTH SURFACES

被引：49

作者：

DOWNS, MJ

MCGIVERN, WH

FERGUSON, HJ

机构：

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1985年 / 7卷 / 04期

关键词：

D O I：

10.1016/0141-6359(85)90005-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：211 / 215

页数：5

共 9 条

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[2]

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[5] SURFACE PROFILE MEASUREMENT WITH A SCANNING DIFFERENTIAL AC INTERFEROMETER [J].

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[6]

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[8] OPTICAL HETERODYNE PROFILOMETRY [J].

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APPLIED OPTICS, 1981, 20 (04) :610-618

[9] THE PREPARATION OF OPTICAL-SURFACES FOR THIN-FILM DEPOSITION [J].

TALIM, SP .

OPTICA ACTA, 1981, 28 (10) :1405-1412

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