INTRINSIC GETTERING BY OXIDE PRECIPITATE INDUCED DISLOCATIONS IN CZOCHRALSKI SI

被引：376
|
作者：
TAN, TY [1 ]
GARDNER, EE [1 ]
TICE, WK [1 ]
机构：
[1] IBM CORP,DIV SYST PROD,ESSEX JUNCTION,VT 05452
来源：
APPLIED PHYSICS LETTERS | 1977年 / 30卷 / 04期
关键词：
D O I：
10.1063/1.89340
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：175 / 176
页数：2
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