GROWTH-KINETICS OF PLATINUM SILICIDE

被引：42

|

作者：

WITTMER, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 09期

关键词：

D O I：

10.1063/1.332782

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5081 / 5086

页数：6

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