FAST HYDROGEN DIFFUSION IN AMORPHOUS-SILICON

被引:13
|
作者
PETROVAKOCH, V
ZEINDL, HP
HERION, J
BEYER, W
机构
[1] UNIV BUNDESWEHR, FAK ELEKTROTECH, D-8014 NEUBIBERG, FED REP GER
[2] FORSCHUNGSZENTRUM JULICH, INST GRENZFLACHENFORSCH & VAKUUMTECH, D-5170 JULICH 1, FED REP GER
关键词
D O I
10.1016/0022-3093(87)90193-1
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:807 / 810
页数:4
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