TRANSPARENT CONDUCTING BORON-DOPED ZINC-OXIDE FILMS DEPOSITED BY DC-MAGNETRON SPUTTERING IN B2H6-AR MIXTURES

被引：26
作者：
NAKADA, T
OHKUBO, Y
MURAKAMI, N
KUNIOKA, A
机构：
[1] Department of Electrical Engineering and Electronics, Aoyama Gakuin University, Setagaya-ku, Tokyo
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 7A期
关键词：
ZNO; ZINC OXIDES; THIN FILMS; SPUTTERING; TRANSPARENT CONDUCTING FILMS;
D O I：
10.1143/JJAP.34.3623
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Transparent conducting ZnO:B films for solar cells were produced by DC magnetron sputtering in B2H6-Ar mixtures. Low-resistivity textured films could be obtained at relatively low substrate temperatures of 150-200 degrees C. The resistivity, electron mobility and carrier concentration were 4 x 10(-4) Omega cm, 60 cm(2)/Vs and 2 x 10(20) cm(-3), respectively. The 2-mu m-thick films showed a sheet resistance of 2 Omega/sq and optical transmission of greater than 85% at wavelengths of 0.6-1.0 mu m. These films exhibited higher optical transmission in the near infrared region than ZnO:Al films with the same resistivity because of high electron mobility. No degradation of resistivity and optical transmission was observed after exposure at 85 degrees C and 95%RH for 5 h.
引用
收藏
页码：3623 / 3627
页数：5
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