DIELECTRIC PROPERTIES OF POLYSTYRENE THIN-FILMS FORMED BY RF ELECTRODELESS EXCITATION

被引：7
作者：
TAKEDA, S [1 ]
机构：
[1] AOYAMA GAKUIN UNIV,COLL SCI & ENGN,TOKYO 157,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 12期
关键词：
D O I：
10.1063/1.322545
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：5480 / 5481
页数：2
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