DIELECTRIC PROPERTIES OF POLYSTYRENE THIN-FILMS FORMED BY RF ELECTRODELESS EXCITATION

被引：7

|

作者：

TAKEDA, S ^{[1
]}

机构：

[1] AOYAMA GAKUIN UNIV,COLL SCI & ENGN,TOKYO 157,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 12期

关键词：

D O I：

10.1063/1.322545

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：5480 / 5481

页数：2

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