THE INFLUENCE OF RADIATION-DAMAGE ON THE SPUTTERING YIELD OF SILICON

被引：12
|
作者：
SIELANKO, J
SOWA, M
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词：
D O I：
10.1016/0167-5087(83)90842-6
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
10
引用
收藏
页码：483 / 486
页数：4
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