SUBMICROMETER MICROELECTRONICS DIMENSIONAL METROLOGY - SCANNING ELECTRON-MICROSCOPY

[31] Rez P., 1983, Ultramicroscopy, V12, P29, DOI 10.1016/0304-3991(83)90302-9

[32] RUSSELL PE, 1984, P SOC PHOTO-OPT INST, V480, P101, DOI 10.1117/12.943054

[33] CHANGES OF VOLUME AND SURFACE COMPOSITIONS OF POLYMETHYLMETHACRYLATE UNDER ELECTRON-BEAM IRRADIATION IN LITHOGRAPHY [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (04): : 482 - 486

[34] SEILER DG, 1984, P SOC PHOTO-OPT INST, V480, P86, DOI 10.1117/12.943052

[35] ONLINE DIGITAL-COMPUTER TECHNIQUES IN ELECTRON-MICROSCOPY - GENERAL INTRODUCTION [J]. JOURNAL OF MICROSCOPY-OXFORD, 1982, 127 (JUL): : 3 - 16

[36] STEIN R, 1986, CALIBRATING MICROSCO, P132

[37] VOLBERT B, SEM1980IV SEM INC, P1

[38] WELLS OC, 1984, SCANNING ELECTRON MI

[39] YAMAJI H, SEM1985I SEM INC, P97

[40] STP15D ASTM

[31] Rez P., 1983, Ultramicroscopy, V12, P29, DOI 10.1016/0304-3991(83)90302-9

[32] RUSSELL PE, 1984, P SOC PHOTO-OPT INST, V480, P101, DOI 10.1117/12.943054

[33] CHANGES OF VOLUME AND SURFACE COMPOSITIONS OF POLYMETHYLMETHACRYLATE UNDER ELECTRON-BEAM IRRADIATION IN LITHOGRAPHY [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (04): : 482 - 486

[34] SEILER DG, 1984, P SOC PHOTO-OPT INST, V480, P86, DOI 10.1117/12.943052

[35] ONLINE DIGITAL-COMPUTER TECHNIQUES IN ELECTRON-MICROSCOPY - GENERAL INTRODUCTION [J]. JOURNAL OF MICROSCOPY-OXFORD, 1982, 127 (JUL): : 3 - 16

[36] STEIN R, 1986, CALIBRATING MICROSCO, P132

[37] VOLBERT B, SEM1980IV SEM INC, P1

[38] WELLS OC, 1984, SCANNING ELECTRON MI

[39] YAMAJI H, SEM1985I SEM INC, P97

[40] STP15D ASTM