DETERMINATION OF OPTICAL, ELASTIC, AND ACOUSTICAL PROPERTIES OF POROUS SILICON AS A FUNCTION OF ANODIZATION CURRENT DENSITY

被引:1
|
作者
Jothi, S. [1 ]
Pandiarajan, J. [1 ]
Lakshmipriya, V. [1 ]
Prithivikumaran, N. [1 ]
Natarajan, B. [2 ]
Jeyakumaran, N. [1 ]
机构
[1] Virudhunagar Hindu Nadars Senthikumara Nadar Coll, Dept Phys, Virudunagar 626001, Tamil Nadu, India
[2] Raja Duraisingam Govt Arts Coll, Dept Phys, Sivagangai 630561, Tamil Nadu, India
关键词
porous silicon; photoluminescence; refractive index; elastic constants; acoustic parameters;
D O I
10.1615/SpecialTopicsRevPorousMedia.v5.i1.50
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Researchers have shown great interest in porous silicon due to the fact that it can be fabricated with specific material characteristics. The electrical, optical, chemical, and mechanical characteristics of the material can all be modified by changing parameters of the fabrication process. The porous silicon was prepared by electrochemical etching of p-type silicon wafer where the etchant consists of a mixture of hydrofluoric acid and ethanol with various anodization current densities and 10 min etching time. The bulk modulus, Young's modulus, propagation velocities of longitudinal and transverse waves, and elastic constants are investigated. The presently investigated numerical data are found to have, in general, good agreement with the available experiment data and other such theoretical values.
引用
收藏
页码:53 / 62
页数:10
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