PROPERTIES OF ION PLATED OXIDE-FILMS

被引：23
作者：
PULKER, HK
HAAG, W
BUHLER, M
MOLL, E
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期
关键词：
D O I：
10.1116/1.572819
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：2700 / 2701
页数：2
相关论文
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