INVESTIGATION OF ORIENTATION EFFECT ON CONTACT RESISTANCE IN SELECTIVELY DOPED AIGAAS/GAAS HETEROSTRUCTURES

被引:19
作者
KAMADA, M
SUZUKI, T
NAKAMURA, F
MORI, Y
ARAI, M
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D O I
10.1063/1.97381
中图分类号
O59 [应用物理学];
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页码:1263 / 1265
页数:3
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共 5 条
[1]   OHMIC CONTACTS TO GAAS [J].
BRASLAU, N .
THIN SOLID FILMS, 1983, 104 (3-4) :391-397
[2]   SOLID-PHASE FORMATION IN AU-GE-NI, AG-IN-GE, IN-AU-GE GAAS OHMIC CONTACT SYSTEMS [J].
CHRISTOU, A .
SOLID-STATE ELECTRONICS, 1979, 22 (02) :141-&
[3]   EXTREMELY LOW CONTACT RESISTANCES FOR ALGAAS/GAAS MODULATION-DOPED FIELD-EFFECT TRANSISTOR STRUCTURES [J].
KETTERSON, A ;
PONSE, F ;
HENDERSON, T ;
KLEM, J ;
MORKOC, H .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (06) :2305-2307
[4]   PREFERENTIAL DIFFUSION AND ORIENTATION EFFECTS OF SCHOTTKY-BARRIER GAAS FIELD-EFFECT TRANSISTORS [J].
MCLAUGHLIN, KL ;
BIRRITTELLA, MS .
APPLIED PHYSICS LETTERS, 1984, 44 (02) :252-254
[5]   LOW-NOISE MICROWAVE HIFET FABRICATED USING PHOTOLITHOGRAPHY AND MOCVD [J].
TANAKA, K ;
TAKAKUWA, H ;
NAKAMURA, F ;
MORI, Y ;
KATO, Y .
ELECTRONICS LETTERS, 1986, 22 (09) :487-488