GROWTH OF ZNO FILMS BY THE PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION TECHNIQUE

被引：30

作者：

SHIMIZU, M

MATSUEDA, Y

SHIOSAKI, T

KAWABATA, A

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1985年 / 71卷 / 01期

关键词：

D O I：

10.1016/0022-0248(85)90064-8

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：209 / 219

页数：11

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