PROCESSING HIGH-PURITY SILICON USED FOR SENSOR APPLICATIONS

被引：4

作者：

TENKATE, WRT ^{[1
]}

AUDET, SA ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,DEPT ELECT ENGN,2600 GA DELFT,NETHERLANDS

来源：

SENSORS AND ACTUATORS | 1989年 / 16卷 / 03期

关键词：

D O I：

10.1016/0250-6874(89)87010-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：287 / 298

页数：12

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