QUANTITATIVE-ANALYSIS OF SILICON-SILICON NITRIDE INTERFACIAL REGIONS USING AUGER-ELECTRON SPECTROSCOPY

被引：0
|
作者：
REMMERIE, J [1 ]
VANDERVORST, W [1 ]
MAES, HE [1 ]
机构：
[1] INTERUNIV MICROELECTR CTR,B-3030 HEVERLEE,BELGIUM
来源：
SURFACE AND INTERFACE ANALYSIS | 1986年 / 9卷 / 1-6期
关键词：
D O I：
10.1002/sia.740090523
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：340 / 340
页数：1
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