QUANTITATIVE-ANALYSIS OF SILICON-SILICON NITRIDE INTERFACIAL REGIONS USING AUGER-ELECTRON SPECTROSCOPY

被引：0

作者：

REMMERIE, J ^{[1
]}

VANDERVORST, W ^{[1
]}

MAES, HE ^{[1
]}

机构：

[1] INTERUNIV MICROELECTR CTR,B-3030 HEVERLEE,BELGIUM

来源：

SURFACE AND INTERFACE ANALYSIS | 1986年 / 9卷 / 1-6期

关键词：

D O I：

10.1002/sia.740090523

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：340 / 340

页数：1

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