ELECTRON-BEAM INDUCED REACTIONS OF OXYGEN ON THE INP(110) SURFACE

An electron beam bombardment of the InP(110) cleaved surface causes a decomposition, an oxidation and a carbon contamination of the irradiated area even in ultrahigh vacuum conditions. The formation of phosphorus oxide is obvious from visual inspection of the P LMM Auger spectra. The indium MNN Auger line shape is rather insensitive to the chemical environment, hence, the determination of the indium bonding state is more difficult. We show the pattern recognition evaluating methods are able to distinguish metallic indium form from indium bonded to phosphorus and indium bonded to oxygen.