AN X-RAY-DIFFRACTION METHOD FOR CHARACTERIZATION OF SEVERAL LATTICE-MATCHED HETEROEPITAXIAL FILMS

被引:1
|
作者
ITOH, N [1 ]
WAKAHARA, A [1 ]
SATO, T [1 ]
PAK, K [1 ]
YOSHIDA, A [1 ]
YONEZU, H [1 ]
机构
[1] TOYOHASHI UNIV TECHNOL, DEPT ELECT & ELECTR ENGN, TOYOHASHI, AICHI 440, JAPAN
关键词
D O I
10.1143/JJAP.28.L2276
中图分类号
O59 [应用物理学];
学科分类号
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页码:L2276 / L2278
页数:3
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