HIGHLY CONDUCTIVE AND TRANSPARENT ZNO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING IN AN APPLIED EXTERNAL DC MAGNETIC-FIELD

被引：123
作者：
MINAMI, T
NANTO, H
TAKATA, S
机构：
来源：
THIN SOLID FILMS | 1985年 / 124卷 / 01期
关键词：
D O I：
10.1016/0040-6090(85)90026-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：43 / 47
页数：5
相关论文
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