FABRICATION OF LOW-LOSS 45-DEGREES INTEGRATED MIRRORS ON DIELECTRIC OPTICAL WAVE-GUIDES

被引：2

作者：

JOANNES, L

GRIMBERT, B

VILCOT, JP

TCHANA, W

DECOSTER, D

机构：

[1] Institut d'Electronique et de Microélectronique du Nord, UMR CNRS 9929, Domaine Universitaire Scientifique, Villeneuve D'Ascq, F‐59652, Villeneuve d'Ascq Avenue Poincaré

来源：

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 1995年 / 9卷 / 06期

关键词：

INTEGRATED OPTICS; DIELECTRIC OPTICAL WAVE-GUIDE; SELF-ALIGNED INTEGRATED MIRRORS;

D O I：

10.1002/mop.4650090617

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High-density low-loss dielectric optical intel connection is demonstrated on a monomode optical waveguide compatible with microelectronics technology. Low-loss self-aligned integrated mirrors (SAIM) on a dielectric (polyimide-silicon nitride-polyimide) optical waveguide have been fabricated Optimization of the reactive ion etching process has been made in order to obtain vertical, homogeneous etched sidewalls. Using such a process, 45 degrees integrated mirrors present reflection losses of 0.6 dB at a 830-nm wavelength (quasi-TE mode). (C) 1995 John Wiley and Sons, Inc.

引用

页码：353 / 355

页数：3

共 7 条

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