PREPARATION OF LEAD-ZIRCONATE-TITANATE THIN-FILMS BY REACTIVE EVAPORATION

被引：18
|
作者：
TORII, K
SAITOH, S
OHJI, Y
机构：
[1] Central Research Laboratory, Hitachi, Ltd, Kokubunji, Tokyo
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 9B期
关键词：
FERROELECTRIC; REACTIVE EVAPORATION; THIN FILM; DIELECTRIC CONSTANT; OZONE; LEAKAGE CURRENT;
D O I：
10.1143/JJAP.33.5287
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Lead zirconate titanate thin films have been successfully fabricated by reactive evaporation. Elemental Pb, Zr, and Ti were evaporated in ozone-oxygen mixture ambient. Excellent controls of uniformity of thickness and composition were achieved over a large area (within +/-2% on 4-inch wafer). The electrical properties were examined as a function of Pb content in the films. High dielectric constant (epsilon similar to 1000) and low leakage current (1.7x10(-7) A/cm(2)) were realized for the film with stoichiometric composition.
引用
收藏
页码：5287 / 5290
页数：4
相关论文
共 50 条
  • [21] Improved dielectric properties of lead lanthanum zirconate titanate thin films on copper substrates
    Narayanan, M.
    Ma, B.
    Balachandran, U.
    MATERIALS LETTERS, 2010, 64 (01) : 22 - 24
  • [22] Characterization of lead-zirconate-titanate (PZT) films formed by photo-decomposition of metal organic polymer
    Zhang, JY
    Boyd, IW
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (4A): : L393 - L394
  • [23] Effects of microstructure on the properties of ferroelectric lead zirconate titanate (PZT) thin films
    W.C. Goh
    K. Yao
    C.K. Ong
    Applied Physics A, 2005, 81 : 1089 - 1093
  • [24] Preparation and Characterization of Screen-printed Lead Zirconate Titanate Thick Films
    Lee, Sung-Gap
    TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, 2006, 7 (02) : 72 - 75
  • [25] Reverse polarization switching in ferroelectric lead zirconate titanate (PZT) thin films
    Oates, William S.
    BEHAVIOR AND MECHANICS OF MULTIFUNCTIONAL AND COMPOSITE MATERIALS 2008, 2008, 6929
  • [26] Nonlinear contributions to dielectric and piezoelectric properties in lead zirconate titanate thin films
    Taylor, DV
    Damjanovic, D
    Setter, N
    FERROELECTRICS, 1999, 224 (1-4) : 727 - 734
  • [27] Preparation and properties of piezoelectric lead zirconate titanate thin films for microsensors and microactuators by sol-gel processing
    Tuchiya, T
    Itoh, T
    Sasaki, G
    Suga, T
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1996, 104 (03) : 159 - 163
  • [28] Preparation and characterization of lead zirconate titanate thin films on si substrate by metal-organic chemical vapor deposition
    Sakurai, A
    Nakaiso, T
    Nishida, K
    Ando, A
    Sakabe, Y
    ELECTROCERAMICS IN JAPAN VII, 2004, 269 : 61 - 64
  • [29] Effect of microwave irradiation on rapid crystallization of ferroelectric lead zirconate titanate thin films
    Wang, Xianwei
    Wang, Zhanjie
    Chen, Yanna
    Zhang, Yuqing
    Zhang, Zhidong
    ADVANCED MATERIALS SCIENCE AND TECHNOLOGY, (IFAMST-8), 2013, 750 : 220 - 223
  • [30] VIBRATION-LEVEL CHARACTERISTICS FOR IRON-DOPED LEAD-ZIRCONATE-TITANATE CERAMIC
    TAKAHASHI, S
    HIROSE, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (5B): : 2422 - 2425
12345