EPITAXIAL-GROWTH OF MGO THIN-FILMS ON SILICON BY DUAL ION-BEAM SPUTTERING

被引：16
|
作者：
LI, YJ
XIONG, GC
LIAN, GJ
LI, J
GAN, ZH
机构：
[1] Department of Physics, Peking University, Beijing
来源：
THIN SOLID FILMS | 1993年 / 223卷 / 01期
关键词：
D O I：
10.1016/0040-6090(93)90720-A
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：11 / 13
页数：3
相关论文
共 50 条
  • [41] ION-BEAM ANALYSIS OF THIN-FILMS
    SOFIELD, CJ
    COOKSON, JA
    VACUUM, 1985, 35 (10-1) : 513 - 513
  • [42] ION-BEAM BONDING OF THIN-FILMS
    BAGLIN, JEE
    CLARK, GJ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 881 - 885
  • [43] IRON THIN FILMS BY MEANS OF DUAL ION-BEAM SPUTTERING.
    Yamaga, M.
    Terada, N.
    Naoe, M.
    IEEE translation journal on magnetics in Japan, 1984, TJMJ-1 (04): : 488 - 490
  • [44] STRUCTURE OF MGO FILMS PREPARED BY ION-BEAM SPUTTERING
    ISHIHARA, T
    MOTOYAMA, M
    NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1989, 97 (08): : 771 - 777
  • [45] Nanocrystalline magnetite thin films grown by dual ion-beam sputtering
    Prieto, Pilar
    Ruiz, Patricia
    Ferrer, Isabel J.
    de la Figuera, Juan
    Marco, Jose F.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 636 : 150 - 155
  • [46] Nanocrystalline magnetite thin films grown by dual ion-beam sputtering
    Prieto, Pilar
    Ruiz, Patricia
    Ferrer, Isabel J.
    De La Figuera, Juan
    Marco, José F.
    Journal of Alloys and Compounds, 2015, 636 : 150 - 155
  • [47] ION-BEAM ENHANCED EPITAXIAL-GROWTH OF GE (001)
    CHASON, E
    BEDROSSIAN, P
    HORN, KM
    TSAO, JY
    PICRAUX, ST
    APPLIED PHYSICS LETTERS, 1990, 57 (17) : 1793 - 1795
  • [48] ROLE OF ION-BEAM ENERGY FOR CRYSTALLINE GROWTH OF THIN-FILMS
    OGATA, K
    ANDOH, Y
    FUJIMOTO, F
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1427 - 1430
  • [49] ION-BEAM SUPPRESSION OF HILLOCK GROWTH IN ALUMINUM THIN-FILMS
    PEACOCK, N
    THIN SOLID FILMS, 1988, 156 (01) : 173 - 180
  • [50] EPITAXIAL-GROWTH OF CUO THIN-FILMS BY INSITU OXIDATION OF CU THIN-FILMS
    KITA, R
    HASE, T
    SASAKI, M
    MORISHITA, T
    TANAKA, S
    JOURNAL OF CRYSTAL GROWTH, 1991, 115 (1-4) : 752 - 757
12345