EPITAXIAL-GROWTH OF MGO THIN-FILMS ON SILICON BY DUAL ION-BEAM SPUTTERING

被引：16
|
作者：
LI, YJ
XIONG, GC
LIAN, GJ
LI, J
GAN, ZH
机构：
[1] Department of Physics, Peking University, Beijing
来源：
THIN SOLID FILMS | 1993年 / 223卷 / 01期
关键词：
D O I：
10.1016/0040-6090(93)90720-A
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：11 / 13
页数：3
相关论文
共 50 条
  • [1] EPITAXIAL-GROWTH OF NBN THIN-FILMS AT ROOM-TEMPERATURE BY ION-BEAM SPUTTERING DEPOSITION
    TAKEI, K
    NAGAI, K
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (05) : 993 - 994
  • [2] EPITAXIAL-GROWTH OF BI4TI3O12 THIN-FILMS BY DUAL ION-BEAM SPUTTERING
    ICHIKAWA, Y
    ADACHI, H
    SETSUNE, K
    WASA, K
    APPLIED SURFACE SCIENCE, 1992, 60-1 : 749 - 753
  • [3] GROWTH OF PEROVSKITE PLZT THIN-FILMS BY DUAL ION-BEAM SPUTTERING
    TOSSELL, DA
    SHORROCKS, NM
    OBHI, JS
    WHATMORE, RW
    FERROELECTRICS, 1992, 134 (1-4) : 297 - 302
  • [4] ION-BEAM SPUTTERING OF THIN-FILMS
    KANE, SM
    AHN, KY
    TUXFORD, AM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C309 - C309
  • [5] Epitaxial growth of SiGe thin films by ion-beam sputtering
    Sasaki, K
    Nakata, K
    Hata, T
    APPLIED SURFACE SCIENCE, 1997, 113 : 43 - 47
  • [6] EARLY GROWTH OF THIN-FILMS DEPOSITED BY ION-BEAM SPUTTERING
    MAA, JS
    HUTCHINSON, TE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 116 - 121
  • [7] PREPARATION OF MGO THIN-FILMS BY DUAL-ION BEAM SPUTTERING
    LI, YJ
    XIONG, GC
    LIAN, GJ
    LI, J
    GAN, ZZ
    CHINESE SCIENCE BULLETIN, 1993, 38 (20): : 1703 - 1707
  • [8] ION-BEAM SPUTTERING OF ZNS THIN-FILMS
    VARITIMOS, TE
    TUSTISON, RW
    THIN SOLID FILMS, 1987, 151 (01) : 27 - 33
  • [9] CHARACTERIZATION OF ZR THIN-FILMS GROWN BY DUAL ION-BEAM SPUTTERING
    TRIGO, JF
    ELIZALDE, E
    QUIROS, C
    SANZ, JM
    VACUUM, 1994, 45 (10-11) : 1039 - 1041
  • [10] PROPERTIES OF SILICON AND ALUMINUM-OXIDE THIN-FILMS DEPOSITED BY DUAL ION-BEAM SPUTTERING
    EMILIANI, G
    SCAGLIONE, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1824 - 1827
12345