ALUMINUM-ALLOY ULTRAHIGH-VACUUM SYSTEM FOR MOLECULAR-BEAM EPITAXY

被引:15
作者
MIYAMOTO, M [1 ]
SUMI, Y [1 ]
KOMAKI, S [1 ]
机构
[1] NATL LAB HIGH ENERGY PHYS,TSUKUBA,IBARAKI 305,JAPAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词
D O I
10.1116/1.573720
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2515 / 2519
页数:5
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