SLOWING DOWN AND THERMALIZATION OF SPUTTERED PARTICLE FLUXES - ENERGY-DISTRIBUTIONS

被引：96
作者：
GRASMARTI, A
VALLESABARCA, JA
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 02期
关键词：
D O I：
10.1063/1.332113
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：1071 / 1075
页数：5
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