CONFINED OXYGEN GLOW-DISCHARGE CLEANING OF SILICON

被引：4
|
作者：
HOFFMAN, DM
THOMAS, JH
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词：
D O I：
10.1116/1.573879
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：536 / 538
页数：3
相关论文
共 50 条
  • [21] ELECTRONIC PROPERTIES OF CRYSTALLIZED GLOW-DISCHARGE SILICON
    REILLY, OJ
    SPEAR, WE
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1978, 38 (03): : 295 - 302
  • [22] GLOW-DISCHARGE DECOMPOSITION OF PHENYLSILANE IN THE PRESENCE OF OXYGEN
    NAKAMURA, T
    SINIGERSKY, VA
    SATO, K
    KOINUMA, H
    MAKROMOLEKULARE CHEMIE-MACROMOLECULAR CHEMISTRY AND PHYSICS, 1990, 191 (07): : 1555 - 1563
  • [23] NUMERICAL-ANALYSIS OF GLOW-DISCHARGE IN OXYGEN
    LASKA, L
    MASEK, K
    RUZICKA, T
    CZECHOSLOVAK JOURNAL OF PHYSICS, 1979, 29 (05) : 498 - 511
  • [24] ELECTRON COLLISION RATES IN OXYGEN GLOW-DISCHARGE
    MASEK, K
    LASKA, L
    RUZICKA, T
    CZECHOSLOVAK JOURNAL OF PHYSICS, 1978, 28 (12) : 1321 - 1334
  • [25] KINETICS OF POLYMER ETCHING IN AN OXYGEN GLOW-DISCHARGE
    JURGENSEN, CW
    POLYMERS IN MICROLITHOGRAPHY: MATERIALS AND PROCESSES, 1989, 412 : 210 - 233
  • [26] GLOW-DISCHARGE
    HIROSE, M
    SEMICONDUCTORS AND SEMIMETALS, 1984, 21 : 9 - 39
  • [27] REDUCTION OF PUMPING TIME FOR A SPUTTERING SYSTEM BY GLOW-DISCHARGE CLEANING
    KAGATSUME, A
    UEDA, S
    AKIBA, M
    KAWABE, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (04): : 2364 - 2368
  • [28] RAPID CLEANING OF BORONIZED WALLS WITH A CHLORINE HYDROGEN GLOW-DISCHARGE
    TOYODA, H
    HANAMI, A
    SUGAI, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (07): : 1322 - 1323
  • [29] Oxygen glow discharge cleaning in ASDEX upgrade
    Hopf, C.
    Rohde, V.
    Jacob, W.
    Herrmann, A.
    Neu, R.
    Roth, J.
    JOURNAL OF NUCLEAR MATERIALS, 2007, 363 : 882 - 887
  • [30] THERMAL-OXIDATION OF GLOW-DISCHARGE SILICON LAYERS
    DANESH, P
    PANTCHEV, BG
    KIROV, KI
    DOKLADI NA BOLGARSKATA AKADEMIYA NA NAUKITE, 1980, 33 (11): : 1471 - 1473
12345