PYROLYSIS OF A POLYSILAZANE PRECURSOR TO SICN CERAMICS

被引：8

作者：

SALVETTI, MG ^{[1
]}

PIJOLAT, M ^{[1
]}

SOUSTELLE, M ^{[1
]}

CHASSAGNEUX, E ^{[1
]}

机构：

[1] RHONE POULENC RECH, CRC, F-69192 ST FONS, FRANCE

来源：

SOLID STATE IONICS | 1993年 / 63-5卷

关键词：

D O I：

10.1016/0167-2738(93)90125-M

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A polysilazane precursor was studied from 500 to 1600-degrees-C by means of thermogravimetry and associated mass spectrometry. At 550-degrees-C, opposite influences of methane and hydrogen partial pressures on the weight loss were evidenced. At 1600-degrees-C, the amorphous solid crystallizes into silicon, silicon carbide and silicon nitride phases by producing carbon and silicon monoxides and nitrogen.

引用

页码：332 / 339

页数：8

共 7 条

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