VACUUM GAUGES AND PARTIAL-PRESSURE ANALYZERS

被引：0
|
作者：
TILFORD, CR
机构：
[1] Nat. Inst. of Stand. and Technol., Gaithersburg, MD
来源：
JOURNAL OF PHYSICS-CONDENSED MATTER | 1993年 / 5卷
关键词：
D O I：
10.1088/0953-8984/5/33A/008
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
This paper briefly reviews the characteristics of several important vacuum instruments; capacitance diaphragm gauges, ionization gauges, spinning rotor gauges, and partial pressure or residual gas analysers.
引用
收藏
页码：A81 / A84
页数：4
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